The ALS130H Series linear motor stage from Aerotech, with its sub-nanometer resolution, superior bi-directional repeatability, and exceptional low-velocity performance is the unparalleled solution for high performance test, measurement, inspection, and other demanding applications.

The ALS130H Series linear motor stage from Aerotech (Pittsburgh, PA), with its sub-nanometer resolution, superior bi-directional repeatability, and exceptional low-velocity performance is the unparalleled solution for high performance test, measurement, inspection, and other demanding applications. According to the company the ALS130H features:

• A center-driven, non-cogging linear motor as the driving element.
• No backlash, windup, or "stiction" normally associated with a lead screw or ball-screw drive.
• A moving magnet track design eliminating the need for cable management and further improves long-term reliability.
• Higher speeds and accelerations.
• A compact yet powerful linear motor driving to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s.
• Step-to-step resolution critical for alignment applications. The ALS130H meets this demand with a resolution of 0.5 nm. The direct-drive linear motor allows the ALS130H to make precise, small resolution steps, which is particularly important in alignment applications where step accuracy is critical. The linear motor and high-resolution encoder system also provide excellent in-position stability.
• Ultra-stiff construction and compact 2-piece design resulting in a stage with unmatched geometrical tolerances. Straightness and flatness for the standard ALS130H is <±2 µm over the entire travel.
• Designed for smooth, vibration-free motion utilizing precision anti-cage-creep cross-roller bearings for the smoothest motion.
• Ripple-free motion required for high-precision scanning and inspection applications.