Rotary & Z Axis

Monday, July 20, 2009

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Polar_Coordinate_stage
The polar coordinate stage features a bridge configuration for mounting a variety of metrology systems.

Micro Precision Automation (MPA) (Richard, CA) presents a 450mm metrology stage. The polar coordinate stage features:

A rotary and Z axis.
A compact footprint for inspecting 450 mm wafers.
A bridge configuration for mounting a variety of metrology systems.
A built in prealigner.
Independent load-unload stations.
A low contact vacuum chuck of 1.7 percent of a 450 mm wafer.
Optional lift pin mechanism for measuring wafer bow.

For more information visit www.microprecisionautomation.com

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