The unit enables precision motion control with resolution in the sub-nanometer realm and 340x340x340 µm travel in XYZ.
PI’s (Auburn, MA) P-563.3CD PIMars stage is a piezo flexure-guided scanning/nanomanipulation system. The unit enables precision motion control with resolution in the sub-nanometer realm and 340x340x340 µm travel in XYZ, significantly more than other capacitive-feedback equipped systems currently provide. Additional features include:
340 x 340 x 340 µm travel range.
66 x 66 mm clear aperture.
Nanometer resolution.
Millisecond responsiveness.
Ultrahigh vacuum versions up to 10-9 hPa available.
Invar, Super-Invar and Titanium versions available.
For more information visit www.pi-usa.us
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