Versatile miniature precision mass airflow sensor utilizes MEMS technology

The D6F-03A3 flow sensor utilizes a MEMS (Micro Electro Mechanical System) chip to measure the mass flow rate of air and other non-corrosive gases.

Market demand for a miniature mass flow sensor for tight packaging applications such as pick & place equipment with multiple heads drove Omron to take its proven MEMS sensor technology and successfully repackage it into a smaller envelope. The resulting product, the D6F-03A3 is a unidirectional MEMS mass flow sensor in the desired compact, streamlined body.

The D6F-03A3 is capable of measuring mass airflow up to 3 LPM with a quick response time, typically <5 msec. These sensors exhibit very stable output performance across the entire scale. Through innovative packaging using miniaturization techniques, these devices measure just 16.8H x 8W x 36.6L (mm) while weighing just 5.27g.

The D6F-03 series operates on a supply voltage of 10.8 to 26.4VDC while consuming just 15mA maximum. Their output signal is analog, 1 to 5VDC with load resistance of 10k Ohms minimum.  The case is composed of molded thermoplastic and aluminum alloy with a three-pin industry standard electrical connector.

There are many applications utilizing these devices including pick & place systems, leak detection, spectroscopy, mass flow controllers, test equipment, and fuel cells.

Engineering samples and a complete set of technical data are available by contacting Omron Electronic Components.

For additional information please contact Omron Electronic Components at 847-882-2288, by emailing components@omron.com, or by visiting www.components.omron.com