High-precision laser nano sensors use auto-focus principles with resolution as fine as 5 nm at speeds up to 250 kHz to quantify surface roughness of any highly reflective material such as glass, silicon wafers, lenses, and circuitry.

The small size and a separate control module allow use in small work envelopes. The lightweight 100 g measuring probe allows its use in conjunction with various machines and robotics. Benefits include non-contact measurement with high accuracy and measurement speed as well as small laser spot size that can measure displacement to just a few nanometers. Applications include precision positioning, quality inspection, measurement of vibration, lenses and glass, roughness, differential thickness measuring, and precision switching.