Product Design & Development

Ethercat Tested, Semi Approved

Thursday, January 10, 2008
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Ethercat Tested, Semi Approved

Technology for industrial equipment accepted and published as SEMI standard

EtherCAT is used in a variety of semiconductor and flat panel display manufacturing applications

The North American SEMI Information & Control Committee accepted the EtherCAT standard, which was published as SEMI E54.20 in October.

Semiconductor Equipment and Materials International (SEMI) has approved EtherCAT for SEMI applications and has accepted EtherCAT as a SEMI standard. The leading standards organization in the semiconductor industry has responded to the growing industry interest in the fastest Industrial Ethernet solution currently on the market.

EtherCAT is used in a variety of semiconductor and flat panel display manufacturing applications. The world's largest supplier of semiconductor manufacturing equipment, Applied Materials, was among the first EtherCAT Technology Group (ETG) members back in 2003.

EtherCAT was officially introduced to the industry at a SEMI congress held in 2004. A year later, Samsung Electronics had developed the first EtherCAT device for ultra high resolution hybrid stage control. Many other manufacturers from this field have joined the ETG (about 100 of the 635 ETG member companies are active in semiconductor manufacturing).

The North American SEMI Information & Control Committee accepted the EtherCAT standard, which was published as SEMI E54.20 in October. This milestone has further accelerated the acceptance of EtherCAT within the semiconductor and flat panel display manufacturing industries.

"The superior performance, bandwidth and topology flexibility of EtherCAT allows it to cover the entire range of communication requirements in semiconductor manufacturing equipment with a single technology: from process control via control computer integration to high-end Motion Control applications," remarks Martin Rostan, executive director of the ETG. "Special devices, which may not yet be available with an EtherCAT interface, can still be integrated seamlessly and cost efficiently thanks to fully integrated fieldbus gateways. The semiconductor industry appreciates this flexible EtherCAT feature, since it supports simple migration. We are proud that EtherCAT has had such an impact on this key industry."

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