Product Design & Development

Nanometer Accuracy

Thursday, September 24, 2009

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Direct-drive_linear_stage
The ANT130-L offers noncontact, non-cogging, frictionless direct-drive for zero backlash and hysteresis.



Aerotech’s (Pittsburgh, PA) ANT130-L series stages offer best-in-class performance in speed, accuracy, resolution, repeatability, reliability and travel range, and are offered in two accuracy grades. With its low profile and outstanding performance, the ANT130-L is the ultimate solution for high-accuracy alignment, inspection, positioning, and measurement stations. The new direct-drive linear stage offers:

  • Noncontact, non-cogging, frictionless direct-drive for zero backlash and hysteresis.
  • High resolution (1 nm), repeatability (50 nm), accuracy (250 nm), and in-position stability (3 nm).
  • Anti-creep cross-roller bearings.
  • Large selection – eight models with travels from 35 to 160 mm.

For more information visit www.aerotech.com

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