Designed for fast, accurate motion control in front-end and back-end fabrication processes, the series offers 32 combinations of motors and amplifiers ranging from 13.5 oz in. of rated torque to 1,550 in.-lbs of peak torque and motor speeds up to 6,000 rpm. The amplifiers minimize the use of precious control panel space and continue to operate at rated torques in cabinet ambient temperatures as high as 55°C without overload. Applications include CMP, cleaning CVD, PVD, chip mounting, wafer handling robots, and automated test and assembly. The open control interfaces also allow simple integration with stepper indexers, PC-based controls, motion controls, and PLCs such as add-on DeviceNet application modules.

Features include high response, velocity loop bandwidth of 400 Hz, high-resolution serial encoders, a maximum rotation speed of 5,000 or 6,000 rpm, settling times less than one-third that of conventional models, and smooth operation at low speed.