Piezoelectric Active Vibration Control is a key ingredient for enabling next-generation, 22 nm scale lithography.
Abstract
Engineers from TMC and PI have developed active vibration isolation technology based on piezo ceramic solid state actuators that has become an established solution in nano lithography applications.
However, active vibration cancellation can also improve stability and resolution in super-resolution microscopy applications.
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Based on digital signal processing algorithms and responsive PI piezo technology with the latest ultra-reliability enhancements, patented[i] STACIS active isolators have proven their dependability in mission-critical fab deployment for over a decade. STACIS is now available in small form-factors ideal for emerging applications ranging from advanced microscopies to nanomanufacturing.
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For more information visit www.techmfg.com and www.pi.ws