The HPS Series 901 Plus Loadlock Transducer is aimed at semiconductor loadlock and other applications that need a wide pressure sensing range. The 901P combines a MicroPirani sensor for reading absolute pressure and a piezo sensor that takes both differential and absolute readings.

The MicroPirani sensor affords readings down to 10-5 Torr and minimizes the effects of convection or position, while the piezo sensor measures atmospheric pressures from 𥃐 to +760 Torr under varying barometric pressure conditions. It also measures gas-independent absolute pressure from 50 to 1,000 Torr to an accuracy of better than 1 percent.

The transducer comes with an RS-485 or RS-232 digital communication interface. It also provides a direct analog output from both of the sensors. For process control applications, the transducer includes three independent set-point relays. Each set point can be assigned to the output of either the piezo sensor or the combined output of the absolute MicroPirani and piezo measurements.

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